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ferrotec EVM-4 Mounting Instruction page 50

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
8
1
9
1
10
1
11
1
11a
1
12
3
13
3
14
2
The drive unit consists of the following parts:
8.3.5 Crucible configuration
Version 1.3.19
Motor and Gearbox
O-Ring 76x1 70NBR/769
Shaft Seal Ring BA 14x22x4 72NBR/902 ss spring
Shaft complete - 1-, 2-, 3-, 4-, 6-, 8- Hearth
Shaft complete - 1-, 2-, 3-, 4-, 6-, 12- Hearth
Allen screw M5x25 DIN 912-8.8 gal Zn
Distance washer 6x12x0,5 DIN 988 gal Zn
Standoff
Fig. 18 Crucible configuration
page 50/64
1-040610
0-601997
1-040910
1-610405
Ferrotec GmbH

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Evm-6Evm-8Evm-10