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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
5.4.3 Magnet current feedthrough
A magnet current feedthrough is needed to supply the magnet current to the x and y-coils.
The connector of the FERROTEC magnet current feedthrough is compatible with the
evaporator unit and ideal for most high vacuum installations. This O-ring sealed unit is
available for holes 25 mm / 32 mm in diameter. We recommend use of the FERROTEC
controller GENIUS with integrated "Gun Rotation Card" (GRC). This controller contains the
motor control and automatically evaluates the position signals of the evaporator.
5.4.4 Sight glass
The vacuum chamber sight glass makes it possible to observe the evaporator/electron beam
from outside. The sight glass should also grant a free view of the melting crucible. A chamber
light would be advantageous for suitable mirror adjustment. The glass must be at least
10 mm thick to protect you against the x-rays arising during evaporation. Should you be in
doubt, contact your nearest FERROTEC representative immediately.
5.4.5 Interlock
For safe and reliable use of the electron beam evaporator, a series of interlocks is needed to
protect the life and health of the users and to secure the operability of the machine.
5.4.6 Chamber
The status of the chamber door must be monitored by a chamber switch. If, for example, the
chamber is open for inspection, maintenance work or a substrate change, a user could
possible touch an unprotected high voltage line that is still live. For this reason an interlock
must be installed to ensure that all parts conducting high voltage are switched off when the
chamber is open.
5.4.7 Vacuum presure
A vacuum switch should be installed to ensure that the evaporation process is only enabled
at a pressure below 0.01 Pa (10
5.4.8 Water
A flow controller must be installed in the water return line to ensure a minimum flow is
maintained during operation. We recommend the FERROTEC flow controller. The
recommended water flow rate is 6...8 I min
valve.
Version 1.3.19
In all cases in which a FERROTEC high voltage feedthrough is
not used the operator alone is responsible for reliable and safe
connection of external and internal high voltage cables.
In all cases in which a FERROTEC drive unit is not used the
operator is responsible for reliable and safe use of the crucible
adjustment; this applies particularly to operation under high
voltage.
−4
mbar)
-1
. The raiser for the plant hat to install a shut off
page 27/64
WARNING
DANGER
Ferrotec GmbH
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