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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Additional equipment (by operator)
5.4
The following additional components must be installed together with the electron beam
evaporator. We presume that these components and modules are available on installation of
the electron beam evaporator.
5.4.1 Power supply
We recommend the high voltage power supplies in the CARRERA series together with a
GENIUS controller from FERROTEC GmbH.
5.4.2 High voltage feedthrough
A dual terminal high voltage feedthrough (or two separate feedthroughs) must be designed
for a filament current of 50 A at a maximum voltage of 10 kV. The FERROTEC high voltage
dual terminal feedthrough is ideal for most high vacuum applications. This pluggable and O-
ring sealed unit is compatible with every bore with a diameter of 25 mm / 32 mm. We
recommend the dual high voltage feedthrough CF-40 for metallically sealed systems. It
consists of a metal-ceramic unit with brass contact connectors on the atmosphere side.
In the following picture the high voltage cable connected to the high voltage feedthrough is
shown.
Version 1.3.19
The grounding wire needs to be placed as close as possible to
the feedthrough to avoid possible radiation emitted from this
wire in case of an arc.
Fig. 6 High voltage cable attached to feedthrough
page 26/64
NOTICE
Ferrotec GmbH
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