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ferrotec EVM-4 Mounting Instruction

Electron beam evaporator
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Mounting Instruction
Electron Beam Evaporator
Ferrotec GmbH
Seerosenstrasse 1
72669 Unterensingen
GERMANY
Telefon:
+49 7022 9270-0
Telefax:
+49 7022 9270-10
Internet:
www. ebgun.com
E-Mail:
ebgun@de.ferrotec.com
Types:
EVM-4
EVM-6
EVM–8
EVM–10
Translation of the original Mounting Instruction
Version 1.3.19

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Summary of Contents for ferrotec EVM-4

  • Page 1 Mounting Instruction Electron Beam Evaporator Types: EVM-4 EVM-6 EVM–8 EVM–10 Ferrotec GmbH Seerosenstrasse 1 72669 Unterensingen GERMANY Telefon: +49 7022 9270-0 Telefax: +49 7022 9270-10 Internet: www. ebgun.com E-Mail: ebgun@de.ferrotec.com Version 1.3.19 Translation of the original Mounting Instruction...
  • Page 2 Liability The manufacturer's liability for the electron beam evaporators EVM-4, EVM–6, EVM–8 and EVM–10 is based on the principles of German law. The manufacturer accepts no liability for damage and losses due to: improper use;...
  • Page 3 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10  Table of content Table of content....................3 Overview and intended use................5 Safety......................10 General warnings.....................18 Installation.......................23 Function and operation..................35 Operation......................39 Cleaning/Maintenance..................40 Troubleshooting....................61 Emergencies....................62 Dismantling/Disposal..................63 Table of pictures Fig. 1 Overview example.....................5 Fig. 2 Example of identification marking..............13 Fig.
  • Page 4 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Manufacturer's declaration Version 1.3.19 page 4/64 Ferrotec GmbH...
  • Page 5 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10  Overview and intended use Overview Evaporator Water distribution unit Drive unit Fig. 1 Overview example The EVM-6, -8 and -10 electron beam evaporators consist of the following main components: Crucible cover Rotary feedthrough...
  • Page 6 The EVM-4, -6, -8 and -10 electron beam evaporators are intended solely for the purpose described above. Any other use or modification of the EVM-4, -6, -8 and -10 electron beam evaporators without the written consent of the manufacturer is deemed improper.
  • Page 7 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Technical specification 2.3.1 Product data DANGER The materials/media needed for operation of the electron beam evaporator in compliance with its intended use are procured and used by the operator of the electron beam evaporator. Proper handling of these materials/media and the related dangers are the sole responsibility of the operator.
  • Page 8 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 2.3.2 Production data, dimensions and weights Model EVM-6 EVM-8 EVM-10 Max. power 6 kW 10 kW 10 kW High voltage 4 … 10 kV 4 … 10 kV 4 … 10 kV Filament current...
  • Page 9 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Model EVM-4 Max. power 3 kW High voltage 4 … 10 kV Filament current 50 A (10 VAC) Beam deflection 270° magnetic Magnet system STD (150°C) X-deflection ±3 A (150 Hz) Y-deflection ±3 A (150 Hz) .
  • Page 10 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 2.3.3.2 Noise emmission Sound pressure level: = 66 dB (A) 2.3.3.3 Illuminance (on evaporation of tungsten) Measured directly at the sight glass Approx. 44 000 lx 2.3.3.4 Magnetic field Maximum in front of the vacuum chamber, •...
  • Page 11 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 NOTICE “NOTICE” gives you recommendations for action, and there is no risk of injury if you fail to comply with them. However, follow these recommendations for action to avoid damage and annoyance. NOTICE Instruction manual mandatory, framed and marked with a book symbol.
  • Page 12 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Danger from the use of X-rays framed and marked with the symbol shown opposite. NOTICE Protective conductor connection marked at the connection points by the symbol shown opposite. NOTICE Environment sign marks actions to protect the environment.
  • Page 13 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Fig. 2 Example of identification marking 1. Month/Year 2. Type Consecutive number Integrated safety systems The integrated safety systems must be checked at regular intervals (d= daily, w = weekly, m = monthly, ½ y = half-yearly, y = yearly).
  • Page 14 V, F, M isolation). The operating and maintenance personnel are trained in the use of the machine at its point of installation by personnel from FERROTEC GmbH. Should you have any questions or be uncertain about anything, please contact FERROTEC GmbH. NOTICE It is strictly forbidden to render any of the safety systems inoperative or to modify their action.
  • Page 15 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Interfaces on the Electron Beam Evaporator Evaporator Water unit Drive unit Fig. 3 Interfaces on the Electron Beam Evaporator There are the following interfaces on the electron beam evaporator: 1. Deflection 2. Cathode connection 3.
  • Page 16 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 The electron beam evaporator may only be operated when the safety devices of the • machine into which the electron beam evaporator has been built have been activated. The person setting up the entire machine must ensure that through suitable technical measures.
  • Page 17 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 cleaning (cleaning agents and disposal) • environmental protection. • In addition, the owner must note: A constant hazard evaluation of the workplaces (danger of hands being crushed, • danger of stumbling) is to be carried out as well with regard to the use or creation of hazardous substances and the hot areas in/around the melting crucible.
  • Page 18 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 The operator has to ensure that the machine is put into a safe operation mode after a • breakdown and that it must be started up again. This function is integrated in the control unit Genius.
  • Page 19 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 DANGER Pay attention to the danger of electric shock when carrying out adjustment, maintenance and repair work! Before touching the electron beam evaporator, discharge it with the grounding rod. DANGER There is a danger of burns at heated parts, especially at the crucible.
  • Page 20 Spare parts and accessories that have not been supplied by us have also not been tested and approved by us. The fitting and/or use of such products could therefore negatively affect the design characteristics of your machine. FERROTEC GmbH accepts no liability for damages arising from the use of non-original parts and non-original accessories.
  • Page 21 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 NOTICE The spare part list is attached to this mounting instruction. The so-called tool kit contains two spare filaments, Viton O-rings and an assortment of small parts. We recommend you keep a supply of the following spare parts in stock (e.g. when...
  • Page 22 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 DANGER The following shut down procedure must be followed before any cleaning, repair or maintenance work is carried out.  Switch off the high voltage power supply.  Vent the vacuum chamber.  Ground all high voltage feedthroughs with the discharge rod.
  • Page 23 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10  Installation Delivery package Mounting Instruction Fig. 4 Delivery package The delivery package consists of: 1. Base unit (evaporator and bottom feedthrough) 2. Pipe spanner 3. Water hose 4. Water distributor 5. Drive cable 6.
  • Page 24 • Quantity and type of transportation units • Machines, devices and other equipment from Ferrotec GmbH are carefully inspected and packed before shipment. Nevertheless, it is still possible that they might become damaged during transit. 5.2.1 Delivery (also for spare and replacement parts)
  • Page 25 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Check the shipment itself for damage (visual inspection)! • Complaints If the shipment was damaged during transit: Immediately contact the last carrier! • Keep the packaging material (for possible inspection or return shipment) •...
  • Page 26 A dual terminal high voltage feedthrough (or two separate feedthroughs) must be designed for a filament current of 50 A at a maximum voltage of 10 kV. The FERROTEC high voltage dual terminal feedthrough is ideal for most high vacuum applications. This pluggable and O- ring sealed unit is compatible with every bore with a diameter of 25 mm / 32 mm.
  • Page 27 This O-ring sealed unit is available for holes 25 mm / 32 mm in diameter. We recommend use of the FERROTEC controller GENIUS with integrated "Gun Rotation Card" (GRC). This controller contains the motor control and automatically evaluates the position signals of the evaporator.
  • Page 28 FERROTEC Service for further support. Assembly, installation Assembly and initial start-up must be carried out by skilled personnel from FERROTEC GmbH or the customer's skilled personnel who have been especially trained for this work. Consult the instruction handbook and technical reference material supplied for assembly and installation of the electron beam evaporator.
  • Page 29 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 equipment. The electron beam will then, for example, not be directed into the crucible, but at the chamber roof. This can cause damage to all components. NOTICE If the base plate is made of magnetic steel, you can avoid a magnetic short circuit by placing 10 mm spacers under the evaporator base plate.
  • Page 30 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 5.5.1.8 Safety All necessary safety switches must be installed and operative before you start the evaporator. Please also obey the instructions in the instruction handbooks for the power supplies. 5.5.2 Installation Base Plate •...
  • Page 31 A sieve filter should also be fitted in the inlet. The flow controller should be set so that it responds at a flow rate less than 6 l/min. You can obtain such a switch from FERROTEC Version 1.3.19...
  • Page 32 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 NOTICE To avoid damage to the evaporator, it is more important to guarantee an adequate flow of water than to worry about the temperature of the cooling water in the outlet. Slight warm water (max. 40°C) does not damage the evaporator.
  • Page 33 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 If you do not have a standard cable from FERROTEC, use Teflon or Kapton-coated cables with a minimum cross-section of 0.25 mm . Magnet current cables must run as far away as possible from and never parallel to high voltage cables.
  • Page 34 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 DANGER Remember that although many components work with small voltages, they can when working with high voltage be charged to its potential. Therefore switch off the high voltage and ground all electric feedthroughs / lines with a grounding rod before coming close to them (<...
  • Page 35 13 Motor Feedthrough 14 Filament block The mode of operation of a Ferrotec electron beam evaporator with a Ferrotec – CARRERA high voltage power supply and Ferrotec – GENIUS deposition controller is described below. Definition of bidirectional deflection It is presumed that the x/y magnet deflection is already integrated in the deposition controller as in the GENIUS.
  • Page 36 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 X = longitudinal y = lateral Fig. 11 Definition of beam deflection All Ferrotec electron beam evaporators are defined according to this logic. For further information, see the instruction handbooks for the power supplies. DANGER Warning Never touch (vacuum) parts connected to the HV cables before you have discharged them with the grounding rod.
  • Page 37 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Material Melting Generally you will obtain significantly higher vacuum evaporation rates at the same operating power with a crucible liner than with evaporation without liner. Crucible liners are also advantageous for high-grade materials such as, for example, gold.
  • Page 38 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 6.1.1.6 High voltage Switch on the filament heater and high voltage. 6.1.1.7 Limits Set the LIMITS for the deflection currents for the electron beam. Increase the emission current slowly until the electron beam can be seen in the crucible.
  • Page 39 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 NOTICE Use a thickness/rate monitor or controller to control evaporation. DANGER Observe the position and deflection of the electron beam constantly during the evaporation process. The beam should never strike outside the adequately filled crucible.
  • Page 40 The operating and maintenance personnel are trained in the use of the electron beam evaporator at its point of installation by personnel from Ferrotec GmbH. For case you have any questions or you are uncertain about anything, please contact Ferrotec GmbH.
  • Page 41 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 DANGER Pay attention to the dangers from magnetism when using and handling the electron beam evaporator. People with cardiac pacemakers (and with insulin pumps and people with active or passive prostheses and ferromagnetic or conductive foreign bodies) may not be used to clean and service the electron beam evaporator.
  • Page 42 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 NOTICE The times specified in this instruction handbook are based on one-shift operation (8 hours/day, 22 days/month, 12 months/year). = Daily ½ Y = Half-yearly = Weekly = Yearly = Monthly W.Hr. = Work hours ¼...
  • Page 43 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Check all plug, screw and clamped joints for firmness and tighten if necessary Check pneumatic components for working order and leaks Function check of the electric drives Check the cooling water system for working order...
  • Page 44 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 8.3.1 Evaporator unit Fig. 13 Evaporator unit 6-8-10 The evaporator unit consists of the following components: Item Qty. Description Art. Nr. Art. Nr. Art. Nr. Evaporator EVM-6 EVM-8 EVM-10 Pole piece, left 1-610000 1-611100...
  • Page 45 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Item Qty. Description Art. Nr. Art. Nr. Art. Nr. Shunt 1-610105 1-610105 Permanent Magnet 1-610106 1-610106 1-616110 Filamentblock 1-700310 1-700310 1-700310 Zylinderschraube M4×8 DIN 912-A2 1-703040 1-703040 1-703040 Allen head screw M5×8 DIN 7984-A2...
  • Page 46 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 The EVM 4 evaporator consists of the following components Fig. 14 Exploded view of the EVM 4 evaporator (vacuum parts) Item Qty. Description P/N EVM 4 Allen head screw Coil cover 1-624002 Coil cover support...
  • Page 47 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Item Qty. Description P/N EVM 4 Allen head screw M 4×10 (set of screws and washer) 1-703022 Crucible 4 Pocket / 6 Pocket 1-624100 / 1-624101 Cover plate 4 Pocket / 6 Pocket 1-624200 / 1-624201...
  • Page 48 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 8.3.3 Water distributor Fig. 16 Water distributor The water distributor consists of the following components: Name Part # Housing Top 1-610501 Housing Bottom 1-610502 Flange split Top 1-610503 Knurled nut Top 1-610504 Flange split Bottom...
  • Page 49 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 8.3.4 Drive unit Fig. 17 Drive unit Position Amoun Description Partnumber Housing Top 1-610401 Housing Bottom 1-610402 Guide PCB 1-610403 Positiondetector PCB 1-610411 Hexscrew M3x8 DIN 84-4.8 gal Zn Decoder Lock Assembly Cover Version 1.3.19...
  • Page 50 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Motor and Gearbox 1-040610 O-Ring 76x1 70NBR/769 0-601997 Shaft Seal Ring BA 14x22x4 72NBR/902 ss spring 1-040910 Shaft complete - 1-, 2-, 3-, 4-, 6-, 8- Hearth 1-610405 Shaft complete - 1-, 2-, 3-, 4-, 6-, 12- Hearth Allen screw M5x25 DIN 912-8.8 gal Zn...
  • Page 51 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 The crucible configuration consists fo the following components: Crucible Part Number Quant. Crucible direct cooled EVM-6 EVM-8 EVM-10 4-Pocket crucible 1-610902 1-611902 1-616623 6-Pocket crucible 1-610903 1-611903 1-616625 8-Pocket crucible 1-610914 1-611914 1-616626 12-Pocket crucible...
  • Page 52 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Fig. 20 Secure rod plugged into shaft Unscrew the hearth assembly by turning counterclockwise. Secure the shaft by holding the secure rod on its position Fig. 21 Unscrewing of the crucible of EVM 6 evaporator Fig.
  • Page 53 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 General maintenance instructions for the individual components Components Checks and maintenance work Interval Make sure there is enough material in the crucible of the Filling Periodically evaporator for a complete process. Remove old evaporation residues from the crucible to...
  • Page 54 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Storage Do not store the permanent magnet in the direct vicinity of other magnetic components. Short the permanent magnet, best with the help of a U-channel iron. Replacement If the permanent magnet is damaged, e.g. by peeling,...
  • Page 55 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Anode plate 1-700502 Screw M5×16 8 10 (pieces) 1-703036 (Set of screws) Screw set 1-703022 Mounting gauge (included in the Tool Kit) 1-700318 Filament There are two methods for replacement of the filament. block Both are described in detail further below.
  • Page 56 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Filemant block Assembly tool Allen screw driver 3 mm Tweezers Fig. 24 Filament block and accessories Disconnect the filament current connectors. • Dismount the anode plate. • Anode plate Filament current connectors Fig. 25 Anode plate and filament current connectors Dismount the clamping pieces.
  • Page 57 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Right and left clamping piece Filament holder placed in the assembly tool Fig. 26 Clamping pieces and assembly tool Remove the filament. • Screws and washers Right and left filament clamp Fig. 27 Fastening and clamps Pick up a new filament with the tweezers.
  • Page 58 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 You can then assemble the filament block again. • Proceed in reverse order to disassembly. • 8.5.3 Rotary feedthrough and positioning unit 8.5.3.1 Rotary feedthrough The rotary feedthrough should only be dismounted by trained and experienced personnel to ensure it does not develop leaks.
  • Page 59 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Fig. 30 Crucible position calibration  Log into service mode (Auto/Manual-user level) and select crucible no. 1:  In the menu "Options-System Setup-source type" select evaporator type no. 1  Select the number of pockets in the menu "Options-System setup-pockets".
  • Page 60 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 8.5.5 Calibration  Adjust the calibration pin at the drive unit so that it can catch in the groove in the decoding cylinder as shown in fig. 8-13. For this the calibration pin must be turned 90° out of its standard setting.
  • Page 61 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10  Troubleshooting DANGER The situations and information on faults, their causes and correction in this chapter are described in such a way that they can be understood by skilled persons (see definition in chapter 3.4 "Safety Precautions") with training in - electrical engineering/electronics - mechanical engineering/maintenance.
  • Page 62 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Fault Cause Remedy HV cables without contact to The measured resistance at filament block the filament block and at the feedthrough must be ¼ Ohm. If the resistance is higher, one of the cables is not connected firmly enough.
  • Page 63 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10  Dismantling/Disposal Dismantling 11.1 Dismantling may only be performed by skilled personnel. Make sure the shut down procedure is followed before beginning dismantling work. Disposal 11.2 The machine is primarily made of copper (except for the electrical equipment) and must be disposed of in accordance with local environmental protection regulations.
  • Page 64 Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10 Notes: Version 1.3.19 page 64/64 Ferrotec GmbH...

This manual is also suitable for:

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