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ferrotec EVM-4 Mounting Instruction page 47

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Item
Qty.
20
1
21
1
22
1
1
8.3.2 Rotary feedthrough
Fig. 15 Rotary feedthrough
The rotary feedthrough consists of the following components
Nr.
2
1
1
2
1
10
1
3
1
4
4
5
2
6
1
7
1
1
11
1
8
1
1
Version 1.3.19
Allen head screw M 4×10 (set of screws and washer)
Crucible 4 Pocket / 6 Pocket
Cover plate 4 Pocket / 6 Pocket
Set of filaments (5 pieces)
O-Ring 8,00-2,00 70NBR/769
Spacer
Flange, split
Washer
Knurled nut
Hexscrew M4×12 DIN 933-A2
Shaft Seal Ring 25×35×7 72NBR/902 NIRO spring
Bushing Dm 18/8 lang
Clamp Bushing Dm 15/15 lang
O-Ring 32×5 70NBR/769
Feedthrough
Shaft, complete
O-Ring 32×5 70NBR/769
Description
page 47/64
P/N EVM 4
1-703022
1-624100 / 1-624101
1-624200 / 1-624201
1-703008
0-601124
1-610302
1-610303
1-610304
1-786504
1-040905
1-610305
1-610306
0-061786
1-610301
1-610310
0-601786
Ferrotec GmbH

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