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ferrotec EVM-4 Mounting Instruction page 54

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Storage
Do not store the permanent magnet in the direct vicinity of
other magnetic components. Short the permanent magnet,
best with the help of a U-channel iron.
Replacement
If the permanent magnet is damaged, e.g. by peeling,
fracture or sudden impact, high temperatures or suspected
demagnetisation, you should replace the permanent magnet
with a new magnet.
8.5.1 Maintenance filament block
Fig. 23 Filament block assembly EVM-6, EVM-8; EVM-10
The filament block consists out of the following components:
item
1
Plain washer
2
Base element
3
Screws M4×10
4
Plain washer
5
Jaw, wide
6
Jaw, narrow
7
Lug
8
Ceramic Insulator
9
Cathode block, right
10
Screw M4×10
11
Power supply connection distribution box
12
Nut M4
13
Cathode block, left
14
Filament
Version 1.3.19
Description
page 54/64
Part number
(Set of screws)
1-700311
(Set of screws)
(Set of screws)
1-700314
1-700315
1-700316
1-700317
1-700313
(Set of screws)
1-700711
(Set of screws)
1-700312
1-703009 (5 pieces)
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10