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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
General maintenance instructions for the individual components
8.5
Components Checks and maintenance work
Make sure there is enough material in the crucible of the
Filling
evaporator for a complete process.
Remove old evaporation residues from the crucible to
Cleaning
prevent uncontrolled melting of the material.
Check the water flow rate and the function of the water
Water
interlock at the evaporator controller.
Check the insulator of the filament block and the ceramic of
the HV feedthrough for unwanted deposits of conductive
Insulators
material. This is especially important when metals are
evaporated. Replace the ceramic insulator when it is coated
over more than 50% of its length.
To simplify cleaning, dismount the crucible. Switch off the
water cooling. Remove the cover plate. Use the assembly
tool (see tool kit, part 18) to remove the complete crucible.
To remove only the top part of the crucible, unscrew the
retaining screws on the top side of the crucible in the case
Evaporator
of directly cooled crucibles and lift off the top part. If the
surface is contaminated, sandblast the corresponding parts.
Protect seals, threads and other sensitive parts with
adhesive tape during sandblasting. Clean the seals carefully
with alcohol or acetone.
Replace eroded HV cables. Replace the magnet current
cables to avoid, for example, short circuits due to brittle
HV supply
isolation.
cable,
magnet
Pay particular attention to replacement of the evaporation
current cable
material: Always clean the crucible thoroughly to prevent
contamination of the new material.
Permanent
Field direction
magnet
Particular attention must be paid to the permanent magnet!
If the permanent magnet has been taken out from
underneath the cover plate, make sure when fitting it again
that it is fitted in correct position. The magnet has a groove
in it to aid orientation. If the evaporator is operated with an
incorrectly positioned magnet or a magnet with changed field
intensity, the electron beam cannot be directed at the
crucible correctly and can therefore damage other
components.
Temperature
Do not expose the permanent magnet to temperatures above
150°C.
Version 1.3.19
page 53/64
Interval
Periodically
Periodically
D
After 20
W.Hr.
Y
or after 500
to 2500
W.Hr.
Y
or after 500
to 2500
W.Hr.
Y
or after 500
to 2500
W.Hr.
Ferrotec GmbH
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