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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
3.2.1.2
Emergency stop system
The electron beam evaporator has to be integrated in a master emergency stop system that
immediately puts the electron beam evaporator into a safe operating state when actuated.
3.2.1.3
Safety systems
Discharge rod
•
Safety switch at the vacuum chamber for the evaporator
•
Safety latch for interlocks
•
Flow controller
•
Vacuum monitor
•
Stop valve for the cooling water supply
•
3.2.1.4
Machine control system
The machine control system has to be equipped internally with a
3-phase, 5-wire supply system with current-carrying midpoint
conductor and separate ground conductor (with YELLOW/GREEN
isolation).
The operating and maintenance personnel are trained in the use of the machine at its point
of installation by personnel from FERROTEC GmbH. Should you have any questions or be
uncertain about anything, please contact FERROTEC GmbH.
Version 1.3.19
It is strictly forbidden to render any of the safety systems
inoperative or to modify their action.
This instruction handbook is an integral part of the electron
beam evaporator and must be kept readily at hand for the
operating personnel at all times. The safety instructions
contained in it must be obeyed.. If the electron beam
evaporator is resold, the instruction handbook must always be
delivered with it as well.
The type, scope and action of the safety systems were
arranged with the operator.
page 14/64
Test
Interval
y
NOTICE
NOTICE
NOTICE
Ferrotec GmbH
Method
V, F, M
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