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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Fault
No emission current,
filament only glows, FPS
LED ON, HV switched on
No beam spot visible,
filament lights up bright,
HV switched on
Maximum emission current
cannot be reached
Evaporation material
sticks to the crucible
Emergencies
In the event of an emergency:
1. Press the emergency stop button on the master control unit. The emergency stop
button is released by pulling out or turning anticlockwise/clockwise.
2. Switch off the main switch if necessary.
Version 1.3.19
Cause
HV cables without contact to
filament block
Filament short circuit
Emission current not enabled,
HV LED at Genius remote
control permanently on
Beam deflection defective
Partial short circuit at the
filament
Limitation by the controller
Inadequate cooling
Crucible too full or too empty
page 62/64
Remedy
The measured resistance at
the filament block and at the
feedthrough must be ¼ Ohm.
If the resistance is higher, one
of the cables is not connected
firmly enough. Check the
contact points.
Check the HV cables. Check
the cathode block after short
circuits at the filament.
Check crucible positioning and
feedback
Check the electromagnetic
deflection; especially the x-
deflection
Check the permanent magnet
Check the magnetic properties
in the surroundings of the
evaporator
Replace the filament and make
sure it is adjusted correctly
Increase the emission
current/filament current limit
Check the flow rate of the
water; min. 6 l/min.
The crucible should not be
overfilled. Do not keep full with
less than 1/3 of the crucible
volume.
Ferrotec GmbH
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