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ferrotec EVM-4 Mounting Instruction page 43

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Check all plug, screw and clamped joints for firmness
and tighten if necessary
Check pneumatic components for working order and
leaks
Function check of the electric drives
Check the cooling water system for working order
Check if warning signs black and yellow are attached
to the vacuum system and readable ( visual inspection)
8.2.2 Inspections
1.
Carry out a visual inspection of the switch cabinet.
Check:
the wiring for kinks, abrasions and burns,
the covers and isolation for damage,
the switch cabinet doors for ease of movement.
2.
Carry out a function test of all sub assemblies in setting mode and in manual mode.
If all the functions work properly, the machine is handed over to the operating personnel.
General maintenance instructions
8.3
Version 1.3.19
Warning
Never touch (vacuum) parts connected to the HV cables
before you have discharged them with the grounding rod.
When you work on the vacuum chamber, check beforehand
whether the mains power switch for the high voltage is off and
the power supply has been disconnected reliably.
Always check whether all safety switches are connected
and in working order before trying to operate the evaporator.
Never bypass the safety switches! Work on the vacuum
chamber presupposes that the complete high voltage power
supply including the supply line outside the chamber is
properly installed, protected against touch, switched off and
interlocked. You can also obtain TÜV-approved grounding rods
from Ferrotec.
page 43/64
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Ferrotec GmbH
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