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ferrotec EVM-4 Mounting Instruction page 46

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
The EVM 4 evaporator consists of the following components
Fig. 14 Exploded view of the EVM 4 evaporator (vacuum parts)
Item
Qty.
1
1
2
1
3
1
4
1
5
1
6
1
7
1
8
1
9
2
10
1
11
1
12
1
13
2
14
1
15
1
16
1
17
1
18
1
19
1
Version 1.3.19
Description
Allen head screw
Coil cover
Coil cover support
Side plate, Right
Main body
Permanent magnet
Side plate, Left
Anode plate
High voltage extensions
Washer
Lock washer
Cathode block (left and right)
Bracket for clamping
Filament clamp left hand, long
Filament clamp right hand, short
Lock washer
Coil system
Ceramic block
Filament block
page 46/64
P/N EVM 4
1-624002
1-624003
1-624004
1-624001
1-624010
1-624005
1-624006
1-700711
1-700323
1-700316
1-700324
1-700325
1-624800
1-700317
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10