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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
applications are optical coating or laboratory-scale coatings with a variety of different
materials or materials requiring sequential or continual rotation of the crucible. The EVM–4,
-6, -8 and -10 electron beam evaporators are designed for direct or contact-cooled crucibles
with a varying number of pockets. The directly cooled crucibles permit intensive cooling for
high coating rates. Contact-cooled crucibles allow easier and quicker crucible changes
without mechanical work. Apart from rotation, the compact (Ø 32 mm) hollow-shaft rotary
feedthrough also serves cooling of the crucible. The hollow shaft is driven directly by a DC
motor with gear. An optical position recognition system guarantees precise crucible position
recognition with feedback to a controller. Proper use of the machine in accordance with its
intended use includes compliance with the manufacturer's operating, maintenance and repair
instructions. The use is restricted to rooms in a building or halls.
Version 1.3.19
The Lifetime of the machinery is approximately 10 years. After
that an inspection (if needed a complete rework) at the
manufacturing company or an authorised company is necessary.
Access to the electron beam evaporator is to be secured by
the unit controller in such a way that it is possible to ensure
that both the rotary crucible movement and the high-voltage
power supply are stopped. To do this, there are the relevant
external connection options at the high-voltage supply and at
the rotary crucible holder. The person setting up the entire unit
is required to integrate this safety function in accordance with
the performance level determined in the functional safety.
The EVM-4, -6, -8 and -10 electron beam evaporators are
intended solely for the purpose described above. Any other use
or modification of the EVM-4, -6, -8 and -10 electron beam
evaporators without the written consent of the manufacturer is
deemed improper. The manufacturer accepts no liability for
resultant damage. The risk is borne solely by the operator. The
EVM–4, -6, -8 and -10 electron beam evaporators may only be
put into operation when it has been ensured that all safety
equipment is operative and the total installation of the vacuum
system comply with EU directives.
Notice on application of the EMC Directive 2004/108/EC in the
manufacturer's declaration: The EVM-4, -6, -8 and -10
electron beam are only allowed to be operated in an industrial
environment.
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NOTICE
WARNING
DANGER
NOTICE
Ferrotec GmbH
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