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ferrotec EVM-4 Mounting Instruction page 17

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
cleaning (cleaning agents and disposal)
environmental protection.
In addition, the owner must note:
A constant hazard evaluation of the workplaces (danger of hands being crushed,
danger of stumbling) is to be carried out as well with regard to the use or creation of
hazardous substances and the hot areas in/around the melting crucible. The measures
are to be defined in work instructions ( hazardous materials according to §20 
GefStoffV) and the working personnel are to be instructed accordingly.
The supervisors must check compliance with the measures stated in the work
instructions.
Ensure that the operating personnel are suitably trained.
Work on electrical equipment is only to be carried out by suitably trained persons. The
connecting cables and terminals must be properly insulated and covered.
It is only possible to ensure optimal functioning of the elements if the machine
controller is working perfectly. The switching states of the limit switches must be
properly incorporated into the machine controller and the signal cables must be in
perfect condition.
The switching and safety facilities for setting up, testing, shutting down (including
shutting down in an emergency), operation, maintenance, cleaning and servicing are
to be installed and verified by the person setting up the entire unit. This includes also
lockable main switches and emergency shut off switches.
Fundamentally speaking, no safety facilities or switches may be changed or removed.
Otherwise it is no longer possible to ensure the safety of man and machine.
The lighting of the workplaces is to be set up by the owner in compliance with ASR
7/3.
The owner must ensure that the operating stations are not affected by waste gases
(such as diesel engine exhaust fumes) or a lack of oxygen.
The workplaces are to be assessed by the owner in accordance with the noise and
vibration regulations. Any noisy areas are to be marked, the employees are to be
instructed about them and must use hearing protection.
The light intensity in the crucible is up to 45 000 lx (depending on the material). Use
the corresponding eye protection.
During setting up, maintenance, cleaning and servicing work the high voltage supply
is to be cut off and all electrical pass-throughs are to be earthed (earthing rod) before
the personnel can get closer than 50 mm.
Vacuum parts are to be earthed with a high-voltage cable connection before contact
with an earthing rod.
After all such work the cable pass-throughs to the evaporator system are to be
checked for breaks or short—circuiting, since it is possible for the beam field to be
deflected, i.e., after all such work it is necessary to check the deflection of the
electron beam at low energy.
The owner is required to provide suitable safety measures for protection against fire
such as suitable fire extinguishes of the stipulated number and size at easily
accessible points and is to instruction his employees about protection against fire.
The warning notes from the documentation for modules supplied by other companies
are to be complied with and integrated into the workplace-related hazard evaluations.
The operator is required to ensure that the electron beam evaporator is only operated
when it is in perfect working order.
Version 1.3.19
page 17/64
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10