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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
2.3.2 Production data, dimensions and weights
Model
Max. power
High voltage
Filament current
Beam deflection
Magnet system
X,Y-deflection
Vacuum
evaporation rate1
(1 nm=10 Å)
Crucible rotation
Emission current
operating pressure
(1 Pa=0.01 mbar)
Cooling water flow
T
<40°C
in
p= 0.4 ... 0.6 MPa
(4...6 bar)
Feedthroughs
Outside diameter
of feedthrough
Weight
Part no.
Dimensions
1
= for aluminium, distance between EB gun and substrate = 250 mm
Version 1.3.19
EVM-6
A
B
C
D
6 kW
4 ... 10 kV
50 A (10 VAC)
270° magnetic
STD (150°C)
±3 A (150 Hz)
>20 nm/s
(>1200 nm/min)
Yes
Max. 600 mA
<0.1 Pa, >10
−6
Pa
6 l/min (6 kW)
2× Ø 8/10 mm PE
32 mm
12 kg
1-61 00 00
A = 256 mm
B = 136 mm
C = 298 mm
D = 106 mm
EVM-8
A
B
C
D
10 kW
4 ... 10 kV
50 A (10 VAC)
270° magnetic
STD (150°C)
±3 A (150 Hz)
>41.6 nm/s
(>2500 nm/min)
Yes
Max. 1000 mA
<0.1 Pa, >10
−6
Pa
6 l/min (6 kW)
8 l/min (10 kW)
2× Ø 8/10 mm PE
32 mm
15 kg
1-61 10 00
A = 287 mm
B = 136 mm
C = 298 mm
D = 144 mm
page 8/64
EVM-10
A
B
C
D
10 kW
4 ... 10 kV
50 A (10 VAC)
270° magnetic
STD (150°C)
±3 A (100 Hz)
>25 nm/s (Ag, 8 kW)
>70 nm/s (Ti, 6 kW)
>20 nm/s (Al, 10 kW)
Yes
Max. 1200 mA
<0.1 Pa, >10
−6
Pa
6 l/min (6 kW)
8 l/min (10 kW)
2 x Ø 8/10 mm PE
32 mm
30 kg
1-61 60 00
A = 327 mm
B = 110 mm
C = 298 mm
D = 202 mm
Ferrotec GmbH
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