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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Version 1.3.19
Pay attention to the danger of electric shock when carrying
out adjustment, maintenance and repair work! Before touching
the electron beam evaporator, discharge it with the
grounding rod.
There is a danger of burns at heated parts, especially at the
crucible. Wear suitable protective gloves.
Danger from X-rays: The German x-ray ordinance (RöV1) -
dated 8 January 1987 and amended of 30 April 2003 (BGBI. I S.
604) - refers to components that work with acceleration
voltages under 10 kV and are therefore deemed sources of x-
ray interference (5.1, Art. 2, RöV). Prerequisite for work with
these x-ray sources are stainless steel chambers (wall
thickness at least 5 mm) and window glass with a minimum
thickness of 10 mm. The x-radiation outside the chamber is
therefore less than 1 µSv/h and therefore below the limit value
for special safety precautions. The vacuum chamber must be
mark with a sign stating that x-ray radiation is generated
inside. The high voltage is not allowed to be extended above
10 KV. It is advisable to have direct eye contact with the
filament when working with the machine for the first time and
after every maintenance job.
Pay attention when observing the work process to the
dangers from UV radiation and the dazzling that can occur.
Wear protective goggles with suitably protective glasses (e.g.
welder's goggles).
Pay attention to the dangers from magnetism when using
and handling the electron beam evaporator. People with
cardiac pacemakers (and with insulin pumps and people with
active or passive prostheses and ferromagnetic or conductive
foreign bodies) must keep clear of the electron beam
evaporator! The limits of how close they may approach the
machine must be clearly marked.
page 19/64
DANGER
DANGER
DANGER
DANGER
DANGER
Ferrotec GmbH
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