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ferrotec EVM-4 Mounting Instruction page 48

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
8.3.3 Water distributor
Fig. 16 Water distributor
The water distributor consists of the following components:
Ref
No
1
1
2
1
3
1
4
1
5
1
6
1
7
1
8
2
9
1
10
8
11
3
12
2
13
1
14
1
15
1
16
3
17
1
18
4
19
4
Version 1.3.19
Housing Top
Housing Bottom
Flange split Top
Knurled nut Top
Flange split Bottom
Knurled nut Bottom
Guide Washer
Dowel pin 3m6x10 DIN 7-A2
Allenscrew m4x6 DIN 912-A2
Hexscrew M4x10 DIN 912-A2
Hexscrew M4x22 DIN 912-A2
O-Ring 17 x 1,5 70NBR/769
O-Ring 28 x 1,5 70NBR/769
O-Ring 31 x 3 70NBR/769
O-Ring 15 x 2,65 70NBR/769
Shaft Seal Ring BA 15x24x7 72NBR/902 st. steel spring 1-040906
Shaft Seal Ring BA 15x30x7 72NBR/902 st. steel spring 1-040907
Elbowjack 1/4", Ø10
Reduction 10/8
Name
page 48/64
Part #
1-610501
1-610502
1-610503
1-610504
1-610505
1-610506
1-610507
0-601077
0-601089
0-601365
0-100564
1-041110
1-041106
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10