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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Operating areas and danger zones at the machines
4.2
The operating area is defined by the operator (overall plant). The danger zone during
adjustment and maintenance work is the immediate area around the electron beam
evaporator.
The danger zones may only be entered for cleaning, maintenance and repair work by skilled
personnel under compliance with applicable safety regulations.
Operating and maintenance personnel
4.3
The operating and maintenance personnel are those people responsible for the transport,
assembly, installation, operation, adjustment and cleaning of the machine as well as for
troubleshooting.
1. The machine may only be operated by trained and authorized personnel.
2. The different responsibilities in the operation of the machine must be clearly defined
and observed so that no confusion with respect to responsibilities arises, thus
endangering safety.
3. Whenever any work (operation, maintenance, repair, etc.) is carried out, the shut
down procedure specified in this instruction handbook must be followed.
4. The operating personnel may not apply any working methods that impair the safety of
the machine.
5. The operating personnel are co-responsible for ensuring that no unauthorized person
works with or on the machine.
6. The operating personnel must immediately report any changes in the machine that
impair its safety to the responsible executive.
Spare and wearing parts
4.4
Spare parts and accessories that have not been supplied by us have also not been tested and
approved by us. The fitting and/or use of such products could therefore negatively affect the
design characteristics of your machine. FERROTEC GmbH accepts no liability for damages
arising from the use of non-original parts and non-original accessories.
Version 1.3.19
When working with the electron beam evaporator (at the
crucible when the vacuum chamber is open), pay attention to
the danger of crushing when the crucible is rotated. If the
genius controller is used this Interlock is integrated.
The danger zone during adjustment, maintenance and repair
work extends 1 m around the electron beam evaporator. The
area needed to open the switch cabinet doors must be taken
into account. Keep the danger zone around the machine free
of objects. Lay cables in such a way that they cannot be
tripped over! The operator must ensure that access to the
danger zones by unauthorised persons is prevented.
page 20/64
DANGER
WARNING
Ferrotec GmbH
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