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ferrotec EVM-4 Mounting Instruction page 58

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
You can then assemble the filament block again.
Proceed in reverse order to disassembly.
8.5.3 Rotary feedthrough and positioning unit
8.5.3.1
Rotary feedthrough
The rotary feedthrough should only be dismounted by trained and experienced personnel to
ensure it does not develop leaks. Should you have any leak or rotation problems with the
rotary feedthrough, we advise you to send the complete unit to your nearest service partner
or directly to Ferrotec GmbH.
8.5.3.2
Drive and positioning unit
If motorised rotation is not possible, but the crucible can be turned by hand without
resistance, there is no frictional connection between crucible shaft and drive shaft. Install the
drive unit as described in the chapter "Installation".
If the position recognition system does not work, i.e. the controller does not receive a
"pocket-in-position" signal, check the following possible sources of the fault:
Defective control cable Check that the cable matches the pin configuration given in
the table below.
Defective control components Check the components and replace them if necessary.
Calibration pin locked in decoding cylinder Check the
calibration.
8.5.4 Crucible position calibration
Crucible calibration is necessary during initial start-up, after changing the crucible and after
all other events that make recalibration necessary, e.g. change in the position of the crucible
after a blockage. Calibration defines the exact position of the crucible defined as crucible no.
1. The following description of crucible calibration relates to operation with a GENIUS
controller. The GENIUS menu commands are shown in English and italicised. Please also
consult the instruction handbook for the controller in this regard:
Version 1.3.19
Fig. 29 Pin configuration
page 58/64
correct procedure for crucible
Ferrotec GmbH

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