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ferrotec EVM-4 Mounting Instruction page 41

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Version 1.3.19
Pay attention to the dangers from magnetism when using
and handling the electron beam evaporator. People with
cardiac pacemakers (and with insulin pumps and people with
active or passive prostheses and ferromagnetic or conductive
foreign bodies) may not be used to clean and service the
electron beam evaporator.
The shut down procedure may only be initiated by skilled
personnel according to the definition in DIN EN 60204 (see also
chap. 3.5).
The following shut down procedure must be followed before
any cleaning, repair or maintenance work is carried out.
1. Switch off the high voltage power supply.
2. Vent the vacuum chamber.
3. For maintenance and repair work, switch off the machine:
- Switch the mains isolator (main switch) on the electric
switch cabinet on to "0".
-
Lock the main switch( each person) with a padlock so
that it cannot be switched back on again.
-
Make sure the machine is dead.
-
Ground all high voltage feedthroughs with the
discharge rod.
4. Shut off the cooling water supply:
- Close the stop valve.
- Lock the stop valve so that it cannot be opened again
by mistake.
Close the open switch cabinet before cleaning so that water
and dust cannot get inside it. There is a danger to life and limb
of the personnel if this procedure is not followed!
page 41/64
DANGER
NOTICE
DANGER
Ferrotec GmbH

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