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ferrotec EVM-4 Mounting Instruction page 56

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Disconnect the filament current connectors.
Dismount the anode plate.
Dismount the clamping pieces.
Remove the filament holder and place it in the assembly tool with the ceramic
insulator at the top.
Dismount the right and left filament clamps.
Version 1.3.19
Fig. 24 Filament block and accessories
Fig. 25 Anode plate and filament current connectors
page 56/64
Filemant block
Assembly tool
Allen screw driver 3 mm
Tweezers
Anode plate
Filament current connectors
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10