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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
6.1.1.2
Evaporation material
Fill the crucible of your choice with the evaporation material. If you have a free choice for
your first work cycle, choose aluminium. This material evaporates excellently at emission
currents of 150 mA and higher. If you are restricted to only a small quantity of material (e.g.
ultra-pure material), use the material with the best evaporation rate. If you are restricted to a
material with a very high rate/emission current ratio, e.g. magnesium fluoride, start
evaporation carefully with 5...20 mA. The crucible should generally not be filled with material
by more than 2 mm above the crucible edge and at least one-third of the crucible volume
should remain filled during the process.
6.1.1.3
Magnetic shunt
Install so-called magnetic shunts above the permanent magnet of the evaporator according
to the high voltage mainly used in the process.
2 shunts
1 shunt
No shunt
6.1.1.4
Pump down
Pump the vacuum chamber down to a pressure of less than 0.05 Pa (5×10
6.1.1.5
Water
Switch on the water cooling system. Make sure the flow rate in the cooling circuit is not less
than 6 l/min. Use the remote control if possible to control the process you can observe
through the sight glass.
Version 1.3.19
Material
Use
Melting
Generally you will obtain significantly higher
vacuum evaporation rates at the same
operating power with a crucible liner than
with evaporation without liner. Crucible liners
are also advantageous for high-grade
materials such as, for example, gold.
Non melting
Crucible liners have no special benefits if
melting or subliming materials are not used.
In this case the crucible liners reduce the
volume of the pocket, possibly cause
contamination during vacuum evaporation
and demand additional care by the user to
avoid damage.
Indium
Always use a TiB
crucible liner for indium because this
2
material alloys even with a water cooled crucible, thereby
damaging the evaporator.
high voltage <7 kV
7 kV < high voltage < 9 kV
high voltage > 9 kV
The x-position of the beam depends on the high voltage used
during the process.
page 37/64
NOTICE
WARNING
−4
mbar).
Ferrotec GmbH
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