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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
15
Anode plate
16
Screw M5×16 8 10 (pieces)
Screw set
Mounting gauge (included in the Tool Kit)
Filament
There are two methods for replacement of the filament.
block
Both are described in detail further below. The first only
describes replacement of the filament, while the second
also describes testing and replacement of the ceramic
insulator. Note that all screws of the evaporator can be
removed with a metric Allen key.
8.5.2 Filament change
Get the assembly tool and template ready.
•
Dismount the filament block.
•
Version 1.3.19
1. Never touch (vacuum) parts connected to the HV cables
before you have discharged them with the grounding rod.
2. When you work on the vacuum chamber, check beforehand
whether the mains power switch for the high voltage is off and
the power supply has been disconnected reliably (see also
"Shut down Procedure").
3. Always check whether all safety switches are connected
and in working order before trying to operate the
evaporator.
4. Never bypass the safety switches!
Work on the vacuum chamber presupposes that the complete
high voltage power supply including the supply line outside the
chamber is properly installed, protected against touch,
switched off and interlocked.
You can also obtain TÜV-approved grounding rods from
Ferrotec.
When a used filament has been removed, it must be replaced
with a new one. Heating to operating temperature causes the
filament to deform, resulting in re-crystallisation in the wire.
This crystallised structure reacts very sensitively to changes in
the shape, e.g. as happens when loosening the filament
clamps. This can cause microscopically small cracks along the
filament wire, which in turn has unforeseeable consequences
for electrical conductivity and process stability. The filament
must be replaced exactly according to schedule.
page 55/64
1-700502
1-703036 (Set of screws)
1-703022
1-700318
or after 500
DANGER
NOTICE
Ferrotec GmbH
Y
to 2500
W.Hr.
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