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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Table of content
1
Table of content.................................................................................................3
2
Overview and intended use................................................................................5
3
Safety..............................................................................................................10
4
General warnings.............................................................................................18
5
Installation.......................................................................................................23
6
Function and operation....................................................................................35
7
Operation.........................................................................................................39
8
Cleaning/Maintenance......................................................................................40
9
Troubleshooting................................................................................................61
10
Emergencies....................................................................................................62
11
Dismantling/Disposal........................................................................................63
Table of pictures
1.1
Fig. 1 Overview example.............................................................................................5
Fig. 2 Example of identification marking....................................................................13
Fig. 3 Interfaces on the Electron Beam Evaporator....................................................15
Fig. 4 Delivery package.............................................................................................23
Fig. 5 Tool-Kit.............................................................................................................24
Fig. 6 High voltage cable attached to feedthrough....................................................26
Fig. 7 Installation of water unit to shaft.....................................................................31
Fig. 8 Cooling water connection.................................................................................32
Fig. 9 Connecting diagram for magnet current drive..................................................32
Fig. 10 Overview (example).......................................................................................35
Fig. 11 Definition of beam deflection.........................................................................36
Fig. 12 System overview............................................................................................39
Fig. 13 Evaporator unit 6-8-10...................................................................................44
Fig. 14 Exploded view of the EVM 4 evaporator (vacuum parts)................................46
Fig. 15 Rotary feedthrough........................................................................................47
Fig. 16 Water distributor............................................................................................48
Fig. 17 Drive unit.......................................................................................................49
Fig. 18 Crucible configuration....................................................................................50
Fig. 19 Secure rod at EVM 6 evaporator.....................................................................51
Fig. 20 Secure rod plugged into shaft........................................................................52
Fig. 21 Unscrewing of the crucible of EVM 6 evaporator............................................52
Fig. 22 Bottom view of crucible hearth......................................................................52
Fig. 23 Filament block assembly EVM-6, EVM-8; EVM-10............................................54
Fig. 24 Filament block and accessories......................................................................56
Fig. 25 Anode plate and filament current connectors.................................................56
Fig. 26 Clamping pieces and assembly tool...............................................................57
Fig. 27 Fastening and clamps....................................................................................57
Fig. 28 Filament adjustment......................................................................................57
Fig. 29 Pin configuration............................................................................................58
Fig. 30 Crucible position calibration...........................................................................59
Version 1.3.19
page 3/64
Ferrotec GmbH
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