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ferrotec EVM-4 Mounting Instruction page 22

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Version 1.3.19
The following shut down procedure must be followed before
any cleaning, repair or maintenance work is carried out.
Switch off the high voltage power supply.
Vent the vacuum chamber.
Ground all high voltage feedthroughs with the discharge
rod.
 For maintenance and repair work, switch off the machine:
-Switch the mains isolator (main switch) on the electric
switch cabinet on to "0".
-Lock the main switch ( each person) with a padlock so that
it can not be switched on again
-Make sure the machine is dead.
-Ground the high voltage feedthroughs and high voltage
conductors (supply line) with the discharge rod.
Shut off the cooling water supply:
- Close the stop valve.
- Lock the stop valve so that it cannot be opened again by
mistake.
Close the open switch cabinet before cleaning so that water
and dust cannot get inside it.
There is a danger to life and limb of the personnel if this
procedure is not followed!
page 22/64
DANGER
Ferrotec GmbH

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