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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Overview and intended use
Overview
2.1
The EVM-6, -8 and -10 electron beam evaporators consist of the
1
Crucible cover
2
Crucible
3
Y-coil
4
X-coil
5
Magnet current connector
6
Magnet
7
Feedthrough
Intended use
2.2
The EVM–4, -6, -8 and -10 electron beam evaporators are multi-hearth electron beam
sources; they were developed, designed and built for medium to large vacuum coating
systems and are intended for use in production, research and development. Typical
Version 1.3.19
1
6
7
8
9
10
11
12
13
Fig. 1 Overview example
following main components:
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2
3
4
Evaporator
Water distribution
8
Rotary feedthrough
9
Water outlet
10 Water inlet
11 Positioning unit
12 Drive socket
13 Motor
14 Filament block
5
14
unit
Drive unit
Ferrotec GmbH
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