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ferrotec EVM-4 Mounting Instruction page 49

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
8.3.4 Drive unit
Fig. 17 Drive unit
Position Amoun
t
1
1
2
1
3
2
4
1
5
4
6
1
7
1
Version 1.3.19
Housing Top
Housing Bottom
Guide PCB
Positiondetector PCB
Hexscrew M3x8 DIN 84-4.8 gal Zn
Decoder Lock Assembly
Cover
page 49/64
Description
Partnumber
1-610401
1-610402
1-610403
1-610411
Ferrotec GmbH

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Evm-6Evm-8Evm-10