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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
If you do not have a standard cable from FERROTEC, use Teflon or Kapton-coated cables with
a minimum cross-section of 0.25 mm
possible from and never parallel to high voltage cables.
5.5.2.4
High voltage cable
Connect the high voltage feedthrough to the connection terminals of the filament block.
Bright copper wire (10 mm
guarantees sufficient stiffness. The high voltage supply line should be kept as short as
possible; preferably approx. 200 mm. Lay the supply line parallel to and with a minimum
distance of 10 mm from the base plate.
5.5.2.5
Shielding
Install grounded shielding plates in a wide area surrounding the evaporator to protect the
(high voltage conducting) parts underneath against the constant bombardment with ions and
against coating. The shielding plates should have a minimum distance of 10 mm from the
high voltage cables and the feedthroughs. Use non-magnetic stainless steel plates by
preference.
5.5.2.6
Shutter
Install the shutter. Adjust the shutter in "closed" state to protect the substrate reliably against
coating. The minimum distance to the evaporator is 50 mm.
5.5.2.7
Interlocks
Check all interlocks for the power supply for correct mode of operation.
5.5.2.8
External cables
Connect the HV and magnet current cables to the power supplies as described in their
instruction handbooks.
5.5.2.9
If the vacuum chamber also has ungrounded resistance heaters, ground a connection point of
the heater or current feedthrough. Make sure by grounding at other components that no high
voltage potential is passed to the outside. Ungrounded components can become charged
with high voltage potential during operation of the evaporator. This voltage can possibly also
reach the outside through connected feedthroughs. Arcs caused by short circuits across
insulating layers or parts can also damage the equipment.
Electron beam evaporators work with very high currents with regard to grounding. They are
able to charge ungrounded components with dangerously high currents. Potential-free
components, e.g. a resistor and its connected feedthroughs or connected cables, can be
charged electrically to such an extent that touching them can be fatal (danger of death).
Version 1.3.19
2
. Magnet current cables must run as far away as
Magnet current cables should be replaced once a year to avoid
unforeseeable short circuits as a result of worn-out cable
isolation. Even Teflon-insulated cables become brittle over
time as a result of the constant bombardment with ions and
the effects of heat.
2
; contained in the tool kit) has a good conductivity and
Make sure that the space underneath the shielding plate can
be pumped down.
Additional components
page 33/64
NOTICE
NOTICE
Ferrotec GmbH
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