Advertisement
Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Operation
System overview
7.1
Fig. 12 System overview
1. High voltage power supply
2. Controller
Version 1.3.19
Use a thickness/rate monitor or controller to control
evaporation.
Observe the position and deflection of the electron beam
constantly during the evaporation process. The beam should
never strike outside the adequately filled crucible.
The system may only be operated by skilled personnel who are
qualified and trained to operate it.
page 39/64
NOTICE
DANGER
WARNING
Ferrotec GmbH
Advertisement
