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ferrotec EVM-4 Mounting Instruction page 51

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
The crucible configuration consists fo the following components:
Crucible
Quant.
Crucible direct cooled
1
4-Pocket crucible
1
6-Pocket crucible
1
8-Pocket crucible
1
12-Pocket crucible
1
1-Pocket crucible
1
Ring shaped crucible
Crucible, brazed version
1
4-Pocket crucible
1
6-Pocket crucible
1
8-Pocket crucible
Exchange of the hearth assembly
8.4
For the unmounting of the hearth assembly please proceed like following. It is absolutely
mandatory to follow the shut down procedure described at the beginning of this chapter.
Version 1.3.19
Further crucibles on request
Never turn the hearth assembly by hand without having
unmounted the drive unit before. Otherwise severe damage to
the drive shaft or the motor maybe caused.
1) Unmount the drive unit
2) Remove the top cover from the evaporator
3) Mount the secure rod at the shaft of the evaporator
Fig. 19 Secure rod at EVM 6 evaporator
page 51/64
Part Number
EVM-6
EVM-8
1-610902
1-611902
1-610903
1-611903
1-610914
1-611914
--
1-611928
1-610901
1-611901
1-610904
1-611904
1-610922
1-611922
1-610923
1-611923
1-611921
NOTICE
EVM-10
1-616623
1-616625
1-616626
--
--
1-616633
1-616630
1-616631
1-616632
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10