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ferrotec EVM-4 Mounting Instruction page 59

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Fig. 30 Crucible position calibration
Version 1.3.19
Log into service mode (Auto/Manual-user level) and select
crucible no. 1:
In the menu "Options-System Setup-source type" select
evaporator type no. 1
Select the number of pockets in the menu "Options-System
setup-pockets".
Select the speed of rotation under "Options-System Setup-
Speed", where -100% represents the maximum speed in
anticlockwise direction
page 59/64
CAUTION
Set the speed in normal operation on a
negative value so that the crucible turns
anticlockwise. This stops the crucible
from being turned off the shaft by the
motor torque in the event of a blockage
in the vacuum area, thereby resulting in
the risk of a water leak. Also switch off
path optimisation in the GENIUS menu
for this.
Ferrotec GmbH

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