Advertisement
Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
5.5.1.8
Safety
All necessary safety switches must be installed and operative before you start the
evaporator. Please also obey the instructions in the instruction handbooks for the power
supplies.
5.5.2 Installation
Base Plate
•
The evaporator should be mounted on a well-grounded base plate. Select the position
•
of the evaporator and corresponding feedthroughs carefully. The bores for the
feedthroughs should be selected in such a way that the feedthroughs can be
connected easily.
Select the location of the evaporator in relation to the location of the substrate. A bore
•
32 ... 34 mm in diameter with a vacuum-side sealing face is needed for this.
Select the location for the high voltage feedthrough near the evaporator, but not in
•
front of the filament block.
Select the location for the magnet current feedthrough near the evaporator so that
•
the magnet current cables are kept as short as possible.
Select a location for the feedthrough for the shutter. The shutter plate must be
•
mounted at least 50 mm above the highest point of the gun and may not block the
view of the selected crucible
Prepare grounding points at which you can ground the evaporator and accessories
•
Prepare holders for fastening of shielding plates. The shielding plates must be
•
grounded.
Finish all mechanical work on the base plate and holes for the feedthroughs.
•
5.5.2.1
Evaporator
Install the evaporator in the following steps A...D (see also fig. 5-1).
A
underneath the evaporator by unscrewing the large nut on the top side of the water
distributor. Unscrew the drive unit by unscrewing the nut of the water distributor above it.
Remove the nut and washer from the base unit. Clean the O-rings carefully. Proceed in
exactly the same way with the threads of the feedthrough, base plate and bores for the
feedthroughs. Use acetone or other alcoholic solutions for this if possible. Do not use a
lubricant or fat. Do not, however, remove the grease on the drive shaft of the evaporator.
B
associated elements. Use acetone, methanol or other alcoholic solutions to clean dirt on the
surface. Pass the feedthrough through the base plate. Make sure that the filament block
(beam exit) points in the direction you want. The O-ring of the feedthrough seals the
evaporator on the vacuum-side surface of the base plate. Fit the spacer and nut on the
feedthrough from underneath the base plate. Fasten the nut with the pipe spanner delivered
with the evaporator.
C
Align the water distributor so that the small O-rings on the top side are flush with the
corresponding pipe ends of the feedthrough..
Version 1.3.19
Unscrew the water distributor with drive unit from
Carefully clean all parts of the vacuum unit and all
Push the water distributor carefully on to the drive shaft.
page 30/64
Ferrotec GmbH
Advertisement
