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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Troubleshooting
Fault finding
9.1
The following fault finding guide deals with problems that can be caused both by the electron
beam evaporator and by the power supplies/controllers. It is not always clear whether a fault
is of a mechanical or electronic nature. Some parts of the fault finding guide have therefore
been taken from the fault descriptions for the power supply.
Fault
Filament does not light up,
magnet current and HV
switched on
Version 1.3.19
The situations and information on faults, their causes and
correction in this chapter are described in such a way that
they can be understood by skilled persons (see definition in
chapter 3.4 "Safety Precautions") with training in
- electrical engineering/electronics
- mechanical engineering/maintenance.
These technicians must be equipped with the proper tools and
test materials. The shut down procedure (see chap. 4.5) must
be carried out before all maintenance and repair work. If the
measures described below do not prove successful, please
contact Ferrotec GmbH.
Never touch (vacuum) parts connected to the HV cables
before you have discharged them with the grounding rod
When you work on the vacuum chamber, check beforehand
whether the mains power switch for the high voltage is off
and the power supply has been disconnected reliably.
Always check whether all safety switches are connected
and in working order before trying to operate the
evaporator
Never bypass the safety switches!
Work on the vacuum chamber presupposes that the
complete high voltage power supply including the supply
line outside the chamber is properly installed, protected
against touch, switched off and interlocked.
You can also obtain TÜV-approved grounding rods from
Ferrotec.
Cause
Filament broken.
page 61/64
DANGER
DANGER
Remedy
Replace filament
Ferrotec GmbH
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