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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
equipment. The electron beam will then, for example, not be directed into the crucible, but at
the chamber roof. This can cause damage to all components.
5.5.1.4
Water line
The cooling water lines must be suitable for a flow of 6...8 I min
and a pressure of 0.4...0.6 MPa (4...6 bar). A flow controller must be installed in the outlet
circuit so that it can also detect a leak in the water system of the evaporator. The cooling
water outflows should not have any reflux. It must be ensured that chemical contamination in
the water does not obstruct the water flow in any way and also does not attack solder joints,
which could lead to leaks.
5.5.1.5
High voltage
Place the high voltage feedthrough in such a way that the length of the necessary supply line
does not exceed 150...200 mm. Excessively long supply lines exacerbate the problem of
adequate HV shielding, while supply lines that are too short conduct too much heat from the
filament block to the HV feedthrough. The high voltage cables should be laid in parallel and
with a minimum distance of 10 mm from the floor. All high voltage conductors must be
protected against ion bombardment. This can be achieved with a cover (e.g. of stainless
steel) that is adequately grounded.
5.5.1.6
Magnet current
The magnet current cables must be suitable for a current of 3 A, i.e. have a cross-section of
at least 0.25 mm
2
. The magnet current cables may not be grounded. The cable isolation
must be vacuum compatible. Please work with Kapton or Teflon isolation for high voltage
applications. Magnet current cables must be laid as far away as possible from high voltage
cables. Never lay magnet current cables parallel to high voltage cables!
5.5.1.7
Grounding
The evaporator must be grounded with a cable with a cross-section of at least 20 mm
the chamber bottom as grounding point. Keep the grounding lines as short as possible and do
not form ground circuits.
Version 1.3.19
If the base plate is made of magnetic steel, you can avoid a
magnetic short circuit by placing 10 mm spacers under the
evaporator base plate. Proceed carefully when using the
machine for the first time and check whether the electron
beam also lands in the middle of the crucible when working
with high voltage.
Make sure that the water pressure at the water inlet does not
exceed 0.6 MPa (6 bar). Magnetically controlled flow valves
can lead to peaks in the water pressure.
Do not use magnetic material for shielding. If stainless steel
has to be used, use a non-magnetic material that is not thicker
than 0.5 mm.
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NOTICE
-1
at 20°C (room temperature)
NOTICE
NOTICE
Ferrotec GmbH
2
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