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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
- The Operation instruction of the complete vacuum system has to be followed.
5.5.2.10
Final inspection
Check the complete system to make sure that all lines are connected and properly tight and
that no HV and magnet current cables are grounded.
Check also that all interlocks are connected, especially:
water interlock
safety interlock
At the vacuum system the following warning notices have to be attached for the following
remaining risks.
1. Warning of hot surfaces (W 26)
2. Warning of high voltage (W08, with Voltage 10 KV)
3. Warning of magnet fields (W13)
4. Prohibition of pacemakers (P11)
5. Warning of X-Rays (W 05)
6. Warning of extensive light (W 09)
Version 1.3.19
Remember that although many components work with small
voltages, they can when working with high voltage be
charged to its potential. Therefore switch off the high voltage
and ground all electric feedthroughs / lines with a grounding
rod before coming close to them (< 50 mm).
Access to the electron beam evaporator is to be secured by
the unit controller in such a way that it is possible to ensure
that both the rotary crucible movement and the high-voltage
power supply are stopped. To do this, there are the relevant
external connection options at the high-voltage supply and at
the rotary crucible holder. The person setting up the entire unit
is required to integrate this safety function in accordance with
the performance level determined in the functional safety.
page 34/64
DANGER
WARNING
Ferrotec GmbH
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