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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
5.4.9 Crucible position
If the crucible is not in the right position, the emission current must be interrupted by a
safety circuit to prevent damage to the crucible. We recommend you use the "pocket-in-
position" signal supplied by the evaporator positioning unit and processed automatically in
the GENIUS controller for this.
5.4.10 Interlock switches
Please use only volt-free make-contacts for all interlock switches so that faults due to
defective cables are also detected. Should you have any questions in this regard, please
contact FERROTEC Service for further support.
Assembly, installation
5.5
Assembly and initial start-up must be carried out by skilled personnel from FERROTEC GmbH
or the customer's skilled personnel who have been especially trained for this work. Consult
the instruction handbook and technical reference material supplied for assembly and
installation of the electron beam evaporator.
5.5.1 Assembly
5.5.1.1
Evaporator
The evaporator must be mounted on the base plate in such a way that it is aligned to the
substrate for homogeneous coating and is electro positively grounded. A bore with a
diameter of 32...34 mm with a seal face for an O-ring gasket on the vacuum side is needed in
the base plate. The maximum thickness allowed for the base plate is 38.5 mm.
5.5.1.2
Sight glass
Make sure you can see the electron beam hitting the crucible through a sight glass. Protect
your sight glass against coating by the evaporation material with, for example, a mirror or a
protective screen.
5.5.1.3
Shutter
The shutter plate must be mounted at least 50 mm above the top edge of the gun. It must
not block the view through the sight glass. The distance between the evaporator and any
magnetisable materials should be at least 50 mm.
If the magnetic field is weakened by mounting of the evaporator on a magnetic base plate,
this will cause a malfunction in the beam deflection that cannot be detected by the safety
Version 1.3.19
The evaporator must be electro positively grounded with a
cross section of at least 20 mm
The window glass must be at least 10 mm thick to protect
against x-rays. Obey your local radiation protection regulations
in this regard.
Check the chamber bottom for magnetic properties. The
evaporator must not be mounted on a magnetic base plate.
page 28/64
DANGER
2
.
DANGER
WARNING
Ferrotec GmbH
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