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ferrotec EVM-4 Mounting Instruction page 21

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
The so-called tool kit contains two spare filaments, Viton O-rings and an assortment of small
parts. We recommend you keep a supply of the following spare parts in stock (e.g. when
minimisation of downtimes is imperative):
Quantity
Description
1
Filament block
1
Filament set (5 pieces)
1
Ceramic insulator
1
Screw set, complete
1
Filament clamp long
1
Filament clamp short
1
O-ring set
1
Magnet current
deflection
Shut down procedure
4.5
Version 1.3.19
The spare part list is attached to this mounting instruction.
EVM-4
1-700317
The shut down procedure may only be initiated by skilled
personnel according to the definition in DIN EN 60204 (see also
chap. 3.5).
page 21/64
NOTICE
Part Number
EVM-6
EVM-8
1-700310
1-700310
1-703000
1-703000
1-700317
1-700317
1-703022
1-703022
1-700314
1-700314
1-700315
1-700315
1-931100
1-931103
1-610800
1-611800
NOTICE
EVM-10
1-700310
1-703000
1-700317
1-703022
1-700314
1-700315
1-931101
1-616800
Ferrotec GmbH

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This manual is also suitable for:

Evm-6Evm-8Evm-10