ferrotec Temescal FC-4400 Facility And Installation Manual
  1. Manuals
  2. Brands
  3. ferrotec Manuals
  4. Industrial Equipment
  5. Temescal FC-4400
  6. Facility and installation manual

ferrotec Temescal FC-4400 Facility And Installation Manual

Evaporation systems
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
0101-9030-0
F
I
G
ACILITY AND
NSTALLATION
UIDE FOR
FC-4400 E
S
VAPORATION
YSTEMS
Revision D, March 2011
Temescal, a division of Ferrotec (USA) Corporation
4569-C Las Positas Road, Livermore, CA 94551
Tel: 1-800-522-1215; Fax: 925-449-4096

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the Temescal FC-4400 and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for ferrotec Temescal FC-4400

Summary of Contents for ferrotec Temescal FC-4400

  • Page 1 0101-9030-0 ACILITY AND NSTALLATION UIDE FOR FC-4400 E VAPORATION YSTEMS Revision D, March 2011 Temescal, a division of Ferrotec (USA) Corporation 4569-C Las Positas Road, Livermore, CA 94551 Tel: 1-800-522-1215; Fax: 925-449-4096...
  • Page 2 3-7, 3-9, and 3-11. Eliminated former Simba 2 control console option. In sections 1.4 and 2.4, corrected Updated information March input power specifications for provided by Temescal Field 2011 vacuum system. Service. © 2011 Ferrotec (USA) Corporation. All rights reserved.

  • Page 3: Table Of Contents

    TABLE OF CONTENTS Section Page Table of Contents..................i Safety Instructions for Operating and Service Personnel ......iii Special Amendment for U.K. Users: Electrical Safety Precautions ..... iv User Responsibility..................v Guidelines and Good Practices ..............v Health Hazard ..................... vi INTRODUCTION AND SITE PREPARATION CHECKLIST Scope and Purpose of this Guide...............
  • Page 4 This page intentionally left blank for pagination purposes. FC-4400 F & I Guide 0101-9030-0, Rev. D...

  • Page 5: Safety Instructions For Operating And Service Personnel

    SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended for service access only. Only experienced service personnel should enter such areas, and only after taking the preliminary precautions described in paragraphs 1 through 6 below. DANGER Potentially lethal voltages may exist within this unit, even with the line power switched off.
  • Page 6 Special Amendment for United Kingdom Users All Electrical Power Sources: Safety Precautions This component is designed to be used in an extra-high-voltage system. Only authorized personnel should be permitted to carry out work on this system. Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and conductors in both the vacuum system and the high-voltage power supply.

  • Page 7: User Responsibility

    Should such repair or replacement become necessary, a telephone or written request for service should be made to Temescal, Livermore, CA, a division of Ferrotec (USA) Corp. The equipment, or any of its parts, shall not be altered without the prior written approval of Temescal.

  • Page 8: Health Hazard

    HEALTH HAZARD The condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles. The nature, as well as the form, of the materials poses the following potential health hazards: a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a protective respirator mask with fine filter that has been approved by the National Institute for Occupational Safety and Health (NIOSH) and the federal Mine Safety and Health Administration (MSHA).
  • Page 9 Fax #: __________________________________ E-mail: __________________________ Thank you for taking the time to review our documentation. Please mail or fax this form back to: Temescal, a division of Ferrotec (USA) Corp. Attn: Customer Support 4569-C Las Positas Road, Livermore, CA 94551...
  • Page 10 This page has been intentionally left blank for pagination purposes. viii FC-4400 F & I Guide 0101-9030-0, Rev. D...

  • Page 11: Introduction And Site Preparation Checklist

    Introduction and Site Preparation Checklist 1.1 Scope and Purpose of this Guide 1.1.1 Overview of F&I Guide The purpose of this Facilities and Installation (F & I) Guide is to provide facility requirements and installation guidelines for your Temescal System. This Guide gives information for preparing your site to receive and install your new equipment.

  • Page 12: General Safety Information

    FC-4400 Facility and Installation Guide Section 1: Introduction and Site Preparation Checklist General Safety Information Specific guidelines concerning Guidelines & Practices, Operating Safety Instructions, and warnings concerning High Voltage and Health Hazards can be found in the front of this F&I Guide, as well as in the fronts of the Operations and Service Manuals.

  • Page 13: Site Preparation Checklist

    Section 1: Introduction and Site Preparation Checklist FC-4400 Facility and Installation Guide SITE PREPARATION CHECKLIST (FC-4400) The Customer is responsible for providing properly rated power, water, air, and gases services to their appropriate termination points at the System prior to installation. Please read this Guide for more specific details.
  • Page 14 FC-4400 Facility and Installation Guide Section 1: Introduction and Site Preparation Checklist Compressed Gases: For additional details, see section 2.3.  Vent Gas: Clean Dry Air (CDA) and/or Nitrogen (N ) (recommended) 60 to 120 psig (4.14 to 8.27 bar) ...

  • Page 15: Facility Requirements

    Facility Requirements This section of the Guide specifies the requirements for the various facilities services, including:  Environment (subsection 2.1)  Water (subsection 2.2)  Compressed gases (subsection 2.3)  Electrical power (subsection 2.4)  Electrical grounding (subsection 2.5) The customer is responsible for properly preparing the site for the delivery, installation, and operation of the system ordered.

  • Page 16: Compressed Gases

    FC-4400 Facility and Installation Guide Section 2: Facility Requirements Cold Water Supply #3 For Edwards Model iGX100 and iGX3/100 pumps: Min./max. inlet pressure 40/100 psig (2.77/6.89 bar) Inlet temperature 10º–30º C Min. flow rate requirements Edwards Model iGX100 0.3 gpm (1.1 L/min.) Edwards Model iGX3/100 0.6 gpm (2.2 L/min.) Regarding water requirements for mechanical pumps other than...

  • Page 17: Electrical Grounding Requirements

    Section 2: Facility Requirements FC-4400 Facility and Installation Guide CV-6SLX Power Supply (6 kVA) 208 VAC, 50/60 Hz, 3-phase 4-wire, 30 A 400 VAC, 50/60 Hz, 3-phase 5-wire delta, 20 A CV-12SLX Power Supply (12 kVA) 208 VAC, 50/60 Hz, 3-phase 4-wire, 50 A 400 VAC, 50/60 Hz, 3-phase 5-wire delta, 30 A Electrical Grounding Requirements 2.5.1...
  • Page 18 FC-4400 Facility and Installation Guide Section 2: Facility Requirements Figure 2-1 Facility and System Grounding Requirements FC-4400 F & I Guide 0101-9030-0, Rev. D...
  • Page 19 Section 2: Facility Requirements FC-4400 Facility and Installation Guide 2.5.2 Low-Impedance Ground for the E-Beam Power Supply Figure 2-2 illustrates the grounding requirements for the Simba 2 power supply. A length of 3-in.-wide copper strap must connect the Simba 2 power module to the system’s central grounding point.
  • Page 20 FC-4400 Facility and Installation Guide Section 2: Facility Requirements Figure 2-3 Low-Z Grounding Requirements on Systems Equipped with a CV-6SLX or CV-12SLX Power Supply 2.5.3 Electron Beam Source Ground To ensure a good ground between the electron beam source and the vacuum cubicle, the following conditions must be met: ...

  • Page 21: Unpacking And Installation

    Unpacking and Installation This section provides information and guidance about what to do with your new system when it has arrived on site, but prior to installation. The customer is responsible for unpacking and preparing the site, as outlined in sections 3.1 and 3.2.

  • Page 22: Customer's Site Preparation Responsibilities

    FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation 3.1.2 Loss or Damage. If any loss and/or damage is claimed: 1. Notify the carrier or the carrier’s agent to request inspection of the loss or damage claimed. 2. Keep all shipping containers until it is determined whether they are needed to return the equipment to Temescal.
  • Page 23 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide 1. Using a forklift, lower the vacuum cubicle to the floor near the spot where it is to be permanently located. Using Figure 3-2, verify that there are adequate clearances for the other equipment that will be installed nearby.
  • Page 24 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation 3.2.5 Installing the E-Beam Power Supply Regardless of which power supply the system uses, install power Drop #2 and connect it to the power distribution box, but do not connect the HV power supply to that drop. The Temescal representative will oversee the connection of that power supply to Drop #2.

  • Page 25: Temescal Installation Responsibilities

    Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Exhaust Gases:  Vacuum cubicle to facility exhaust  Mechanical pump to facility exhaust Electrical Connections:  In 208-V installations, connect power Drops #1 and #2 to the power distribution box, as shown in Figure 3-4.
  • Page 26 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Electrical Power:  Connections between power distribution box and - Vacuum cubicle - Operator station - Mechanical pump and blower, if any - Cryopump compressors - Simba 2 power module (Simba 2 power supply only) ...

  • Page 27: Installation Drawings

    Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide 3.3.6 System Ready for Startup System installation should be complete when:  all system components are properly positioned  all required service connections have been made and verified  all necessary adjustments have been made. The system is then ready for inspection and startup by a Temescal service representative.
  • Page 28 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-2 System Plan View, Showing Dimensions of Main System Components (System Shown with Optional Simba 2 Power Supply) FC-4400 F & I Guide 0101-8604-0, Rev. D...
  • Page 29 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Figure 3-3 Utility Connection Points on Rear of Vacuum Cubicle 0101-9030-0, Rev. D FC-4400 F & I Guide...
  • Page 30 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-4 Routing of Customer-Supplied Service Lines in 208-V Installations FC-4400 F & I Guide 3-10 0101-8604-0, Rev. D...
  • Page 31 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Figure 3-5 Routing of Customer-Supplied Service Lines in 400-V Installations 0101-9030-0, Rev. D 3-11 FC-4400 F & I Guide...
  • Page 32 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-6 Routing of Temescal-Supplied Helium Lines to Cryopump Compressors Figure 3-7 Routing of Control/Data Cables on Simba 2-Powered Systems with the Optional Simba 2 Control Console FC-4400 F & I Guide 3-12 0101-8604-0, Rev.
  • Page 33 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Figure 3-7 Routing of Control/Data Cables on Simba 2-Powered Systems 0101-9030-0, Rev. D 3-13 FC-4400 F & I Guide...
  • Page 34 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-8 Routing of Electrical Power Cables on Simba 2-Powered Systems FC-4400 F & I Guide 3-14 0101-8604-0, Rev. D...
  • Page 35 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Figure 3-9 Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Supply 0101-9030-0, Rev. D 3-15 FC-4400 F & I Guide...
  • Page 36 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-10 Routing of Power and Control/Data Cables on Systems With Either the CV-6SLX or the CV-12SLX Power Supply FC-4400 F & I Guide 3-16 0101-8604-0, Rev. D...
  • Page 37 Section 3: Unpacking and Installation FC-4400 Facility and Installation Guide Figure 3-11 Routing of EMO Cables and Copper Grounding Straps on Systems With Either the CV-6SLX or the CV-12SLX Power Supply 0101-9030-0, Rev. D 3-17 FC-4400 F & I Guide...
  • Page 38 FC-4400 Facility and Installation Guide Section 3: Unpacking and Installation FC-4400 F & I Guide 3-18 0101-8604-0, Rev. D...

Table of Contents