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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Function and operation
The EVM-6, 8 and 10 electron beam evaporators consist of the following
1
Crucible cover
2
Crucible
3
Y-coil
4
X-coil
5
Magnet current connection
6
Magnet (concealed shunt)
7
Feedthrough
The mode of operation of a Ferrotec electron beam evaporator with a Ferrotec – CARRERA
high voltage power supply and Ferrotec – GENIUS deposition controller is described below.
Definition of bidirectional deflection
It is presumed that the x/y magnet deflection is already integrated in the deposition
controller as in the GENIUS. See the following fig. 11 for definition of x (longitudinal) and y
(lateral) direction.
Version 1.3.19
1
6
7
8
9
10
11
12
13
Fig. 10 Overview (example)
main components:
page 35/64
2
3
8
Rotary feedthrough
9
Water outlet
10 Water inlet
11 Positioning unit
12 Drive socket
13 Motor
14 Filament block
4
5
14
Evaporator
Water unit
Drive unit
Ferrotec GmbH
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