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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
All Ferrotec electron beam evaporators are defined according to this logic. For further
information, see the instruction handbooks for the power supplies.
Initial start up
6.1
Make sure that you have a free view of the position of the electron beam and of the heating
spiral (filament) through the sight glass.
6.1.1.1
Crucible liner
Select a pocket and turn the crucible to the selected position. Use a crucible liner if
necessary.
Version 1.3.19
X = longitudinal
y = lateral
Fig. 11 Definition of beam deflection
Warning
Never touch (vacuum) parts connected to the HV cables
before you have discharged them with the grounding rod.
When you work on the vacuum chamber, check beforehand
whether the mains power switch for the high voltage is off
and the power supply has been disconnected reliably.
Always check whether all safety switches are connected and
in working order before trying to operate the evaporator.
Never bypass the safety switches! Work on the vacuum
chamber presupposes that the complete high voltage power
supply including the supply line outside the chamber is
properly installed, protected against touch, switched off and
interlocked.
You can also obtain TÜV-approved grounding rods from
Ferrotec.
page 36/64
DANGER
Ferrotec GmbH
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