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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
3. Filament power supply
4. Electron beam evaporator
5. Vacuum chamber (by operator)
6. Grounding rod
Modes of operation
7.2
Cleaning/Maintenance
Skilled person
A person with relevant technical training, know-how, experience and knowledge of applicable
standards to enable him or her to assess the work assigned to him or her and to perceive
potential risks.
The above definition is based on EN 60204-1.
For trouble-free operation of the electron beam evaporator it is absolutely essential that it is
cleaned and serviced at regular intervals.
Version 1.3.19
The components shown in fig. 12 are needed to operate the
electron beam evaporator. They come with their own
instruction handbooks, which must be followed.
The modes of operation are described in the separate
instruction handbooks of the components making up the
system.
The chapter Cleaning / Maintenance is intended for skilled
personnel only. Maintenance, cleaning and repair work may
only be carried out by skilled personnel.
The operating and maintenance personnel are trained in the
use of the electron beam evaporator at its point of installation
by personnel from Ferrotec GmbH. For case you have any
questions or you are uncertain about anything, please contact
Ferrotec GmbH.
Maintenance and cleaning of vendor components (e.g. drive
motor) are described in their manufacturer's separate
instruction handbooks. They are contained in the technical
reference material.
page 40/64
NOTICE
NOTICE
DANGER
DANGER
NOTICE
Ferrotec GmbH
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