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ferrotec EVM-4 Mounting Instruction page 31

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Fig. 7 Installation of water unit to shaft
Then screw the water distributor on to the feedthrough with the top union nut of the
distributor.
D
Connect the drive unit to the water distributor from below and fasten loosely with the
bottom groove on the water distributor. Turn the crucible until the stud at the end of the
crucible shaft catches in the groove of the motor-side shaft. Fasten the drive unit with the
bottom union nut of the water distributor. See fig. 17 for alignment of the crucible position.
Install the feedthroughs for the magnet current, high voltage and screen.
5.5.2.2
Cooling water
Connect all water connections and make sure that none of the connections leak. Connect the
supply line to the connection marked "CR IN" (Crucible In). Use the water hose to connect the
crucible outlet "CR OUT" with the plug connection for the top part of the source (marked
"MAGNET") in series.
Connect the cooling water outlet to the second plug connector of the magnet connection
(marked "MAGNET", direction-independent).
For a higher flow rate or better cooling at high powers (> 6 kW), please use two cooling
circuit (for the crucible and for the top part of the source separate).
The evaporator needs a cooling water flow of at least 6 l/min.
Never run the evaporator without suitable cooling.
For these reasons the evaporator should be equipped with a flow safety switch mounted in
the outlet. A sieve filter should also be fitted in the inlet. The flow controller should be set so
that it responds at a flow rate less than 6 l/min.
You can obtain such a switch from FERROTEC
Version 1.3.19
page 31/64
Ferrotec GmbH

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