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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
6.1.1.6
High voltage
Switch on the filament heater and high voltage.
6.1.1.7
Limits
Set the LIMITS for the deflection currents for the electron beam. Increase the emission
current slowly until the electron beam can be seen in the crucible.
As long as your x-deflection current is not set correctly, you will not find your beam spot
exactly in the middle of the crucible. Look for fluorescent luminous phenomena, caused by
secondary excitation, behind the electron beam. As long as the emission current remains
under 50 mA in the case of aluminium (without crucible liner), there is not enough energy
available to heat the evaporation material sufficiently. Do not exceed an emission current
of 50 mA.
If the filament block is aligned correctly, no signs of heating should be seen on the anode
plate.
6.1.1.8
Electron beam
Adjust the deflection current until the electron beam can be seen exactly in the middle of the
evaporation material.
6.1.1.9
Dynamic deflection
Adjust the AMPLITUDE setpoint until the width of the electron beam in x and y-direction fits
the evaporation material. Also consult the documentation delivered with your controller in
this regard. Adjust the other parameters for beam deflection (FREQUENCY, WAVEFORM, ...) to
your requirements.
6.1.1.10
Evaporation
Increase the emission current to bring the evaporation material to evaporate. As soon as the
material evaporates, adjust the emission current to obtain the required rate of evaporation.
Version 1.3.19
If you cannot find a fluorescent beam impact point, do not
increase the emission current, but change the LIMITS
accordingly. If this does not help you find the beam, switch off
your power supply and go through all the installation steps
again. Also consult the troubleshooting guide (see chap. 9
"Troubleshooting").
Only direct the electron beam at an adequately full crucible.
The energy density of the beam is so strong that it can melt
through any material, which can result in damage to
components accompanied by vacuum or water leaks. Switch
the current off immediately if the edge of the anode plate near
the filament becomes glowing red. Air the vacuum chamber
and inspect the parts of the filament block (see setting of the
filament block in chap. 8.2, "Maintenance").
page 38/64
DANGER
DANGER
Ferrotec GmbH
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