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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Technical specification
2.3
2.3.1 Product data
Processable products
Operating conditions
Bake out temperature:
Water
Flow rate:
Pressure:
Temperature:
PH Value:
Material
Crucible:
Filament block:
Pole shoe:
Connections
High voltage:
X / Y magnet coil:
Cooling water:
Version 1.3.19
The materials/media needed for operation of the electron
beam evaporator in compliance with its intended use are
procured and used by the operator of the electron beam
evaporator. Proper handling of these materials/media and the
related dangers are the sole responsibility of the operator. The
operator must supply his operating personnel with information
and instructions on dangers and disposal. The safety data
sheets of the material/media manufacturers must be
observed.
Substrate
Make sure that the water pressure at the water inlet does not
exceed 0.6 MPa (6 bar). Magnetically controlled flow valves
can lead to peaks in the water pressure. It must be ensured
that chemical contamination in the water does not obstruct the
water flow in any way and also does not attack solder joints,
which could lead to leaks. Especially no deposition within in
the water channels are allowed
OFHC-Cu 99.99% (ASTM-F-68-99)
Stainless steel, optional Mo or Ta, W, Al
Nickel-plated
2×10 mm
3-pin FISCHER plug
8/10 mm PE hose
page 7/64
DANGER
Max. 100°C (water off)
Max. 140°C (water on)
6...8 I/min.
0.4...0.6 MPa (4...6 bar)
Max. 40 °C
pH 6,5...8
Notice
2
, Cu
O
2
3
Ferrotec GmbH
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