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ferrotec EVM-4 Mounting Instruction page 52

Electron beam evaporator

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Mounting Instructions EVM-4, EVM-6, EVM-8, EVM-10
Fig. 20 Secure rod plugged into shaft
4)
Unscrew the hearth assembly by turning counterclockwise.
Secure the shaft by holding the secure rod on its position
Fig. 21 Unscrewing of the crucible of EVM 6 evaporator
Fig. 22 Bottom view of crucible hearth
5. For the mounting of the hearth assembly back onto the shaft again follow the described
step in reverse. Pay attention that the O-ring is slightly greased. The sealing area of the O-
ring on the shaft must be free of particles.
Version 1.3.19
page 52/64
Ferrotec GmbH

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Evm-6Evm-8Evm-10