Recommended Maintenance Intervals For Main Parts - Edwards STP-XF803 Series Instruction Manual

6.4.3

Recommended maintenance intervals for main parts

6
Internal components of the STP pump will be damaged from gas load, heat, and corrosion when
used long-term. Deterioration or abrasion of the main parts of the STP pump will cause unexpected
failures. When overhauling the STP pump, replacement of main parts are recommended. Refer to
the following list as recommended maintenance intervals for main parts.
Main part name
Rotor blades
Rotor blades
(High radiation coating specification)
Rotor shaft
Motor, Magnetic bearing unit
Vacuum connector
Temperature sensor (vacuum side)
Air-cooling fan
PCBA in the control unit
Accessories TMS valve
*1: Maintenance intervals of any parts may be shortened depending on the condition of use.
The costs of replacing parts that need to be replaced when deterioration or abrasion is observed will
be at the customers charge, even though a period is not exceeding the recommended maintenance
intervals.
When overhaul of the STP pump is needed, contact Service office.
MT-00E-2A1-C
Page 50
STP Series Turbomolecular Pump
TMS heater
Outlet port heater
Connection cable
Recommended maintenance intervals
When using corrosive
gas
3 years
3 years
3 years
5 years
5 years
3 years
5 years
7 years
3 years
3 years
5 years
*1
When not using
corrosive gas
5 years
5 years
5 years
7 years
7 years
5 years