B External Connections
Connecting the Edwards oil-free roughing pumps
The oil-free roughing pump option involves the use of two Edwards
pumps, a type XDS35i (pump 1) and an XDS100B (pump 2).
To connect the oil-filled roughing pumps, see
Note:
Leybold oil-filled roughing pumps" on page
Edwards oil-free roughing pump:
Rear
Electrical
connections
Warning:
must lift the pump.
248
February 28, 2014, 715002212 Rev. C
Front
TP03165
To avoid skeletal or muscle injury, at least two people
"Connecting the Oerlikon
241.
Inlet flange
Gas ballast control
switch (XDS35i only)
in the opened position
Exhaust port flange
™
roughing