Connecting the Edwards oil-free roughing pumps
This option requires the use of two, Edwards™, oil-free roughing pumps
(types XDS46i and XDS100B) as an alternative to the oil-filled roughing
pumps.
To connect the oil-filled roughing pumps, see
Note:
Leybold oil-filled roughing pumps" on page
Edwards XDS46i oil-free roughing pump:
The Edwards XDS100B roughing pump is similar in appearance to the
Note:
XDS46i pump.
B-10
External Connections
Inlet flange
TP03165
"Connecting the Oerlikon
B-3.
Exhaust port flange