Connecting the Oerlikon Leybold oil-filled roughing
pumps
This option requires the use of two, identical, Oerlikon
roughing pumps.
To connect the alternative, oil-free roughing pumps, see
Note:
Oerlikon Leybold oil-filled roughing pump:
Connecting the Oerlikon Leybold oil-filled roughing pumps
February 28, 2014, 715002212 Rev. C
®
Leybold™, oil-filled
page
248.
Inlet port
Exhaust port
241