Fit And Configure The Pressure Sensor; Using A Different Gauge; Figure 68 Pid Pdt Menu Items - Edwards GXS Series Instruction Manual

Figure 68 PID PDT menu items

To set up the PID, follow these steps:

9.11.1 Fit and configure the pressure sensor

1. Fit the auxiliary gauge cable accessory by following the instructions given in the
installation manual supplied with the accessory.
2. Physically fit the active strain gauge or active Pirani gauge to a convenient port on
the process chamber.
3. Connect the gauge into the auxiliary gauge connector on the back panel. (Refer to
Figure: The controls/connectors on the rear of the pump (system with rear exhaust
and castors/levelling feet
4. From the Fit accessory menu choose Auxiliary Gauge and then select appropriate
gauge from the list.
5. From the Setup menu select Set sequences.
6. From the Sequences menu select PID....
7. From the PID menu select PID gauge...
8. From the PID gauge menu select Auxiliary gauge.
You can also use a different gauge as the PID gauge. Refer to
page 149.

9.11.2 Using a different gauge

It is possible to configure the PID settings so that a different pressure gauge is used as
the PID gauge.
M58800880_H - Pump display terminal
fitted), item 14).
Page 149
Using a different gauge on