Tms Heater Cable; Tms Sensor Cable - Edwards STP-XF1303 Series Instruction Manual

Turbomolecular pump
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3.6.1

TMS heater cable

The primary power supply voltage is output from "X5 HEATER OUT 1" and "X7
HEATER OUT 2" connectors. When connecting/disconnecting cables, always power off
the STC-U (switch the STC-U MAIN POWER to "OFF") and isolate (Lockout/Tagout)
the electrical energy source, water and gas, and other energy sources on the vacuum
Connect the plug (pin) side of the TMS heater cable to the "X5 HEATER OUT1" on the STC-U and
connect the receptacle (socket) side to the connector on the STP pump.
To "X5 HEATER OUT1" on STC-U
1
3.6.2

TMS sensor cable

Connect the plug (pin) side of the TMS sensor cable to the "X6 SENSOR" on the STC-U and connect
the receptacles (sockets) side to each connector on the STP pump.
To "X6 SENSOR" on STC-U
1
1.
10 pin (pin)
STC-U eTMS unit
WARNING
equipment.
1.
3 pin (pin)
Figure 15 - TMS heater cable
2.
4 pin (socket)
Figure 16 - TMS sensor cable
To TMS heater connector on STP pump
2.
3 pin (socket)
To TMS sensor connector on STP pump
To Rotor temp. sensor connector on STP pump
3.
9 pin (socket)
2
2
3
MT-92E-A01-C
Page 19
3

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